ATLEX S
ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications
ATLEX-S main features:
Ultra compact size
Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Totally air-cooled, active thermal management
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Energy stabilization mode
Meets European CE-standard
RoHS compliance
Applications
ATLEX-S Specifications |
Gas Medium | ArF | KrF | Units |
Wavelength | 193 | 248 | nm |
High Voltage Switching Technique | Solid State Switch | Solid State Switch |
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Max. Rep. Rate | 300 | 500 | 300 | 500 | Hz |
Max. Pulse Energy 1 | 10 | 10 | 15 | 15 | mJ |
Max. Average Power
| 2,4
| 4
| 4
| 6
| W
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Pulse Duration 2 | 5 – 8 | ns |
Beam Dimensions 2 (V x H) | 4 x 6 | mm |
Beam Divergence 2 (V x H) | 1 x 2 | mrad |
Energy Stability (standard deviation) | < 3 | % |
Dimensions (LxWxH) click here for details | 630 x 400 x 300 | mm |
Weight | 65 | kg |
Cooling | Air |
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Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz |
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM |
