ATLEX-500-I
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications
ATLEX-500-I main features:
Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Totally air-cooled, active thermal management
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Energy stabilization mode
Meets European CE-standard
RoHS compliance
Applications
ATLEX-500-I Specifications |
Gas Medium | F2 | ArF | KrF | XeCl | XeF | Units |
Wavelength | 157 | 193 | 248 | 308 | 351 | nm |
High Voltage Switching Technique | Solid State Switch |
|
Max. Pulse Energy 1 | 1 | 10 | 15 | 8 | 7 | mJ |
Max. Average Power
| 0.5
| 4.0
| 6.5
| 3.0
| 2.5
| W
|
Max. Rep Rate
| 500
| Hz
|
Pulse Duration 2 | 5 – 8 | ns |
Beam Dimensions 2 (V x H) | 4 x 6 | mm |
Beam Divergence 2 (V x H) | 1 x 2 | mrad |
Energy Stability (standard deviation) | < 3 | % |
Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm |
Weight | 60 | kg |
Cooling | Air |
|
Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|
All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM
|
